VSA100A diff. to ambient
The INFICON Vacuum Switch VSA100A is used as a safety switch in vacuum systems. For example, to automatically interrupt the gas supply when venting vacuum systems with a purge gas at a pressure of 6 mbar below atmospheric pressure. At a differential pressure of 6 mbar resp. return switching pressure of 3 mbar below atmospheric pressure, an elastic diaphragm actuates a changeover contact which in turn may be used to switch directly any ancillary equipment.
Benefits
- Reliable and budget-priced vacuum switch
- High life time
- Rugged design
- Easy to integrate
- IP 44 protection
Typical Applications
- Control of load lock chambers
- Safety shutdown of vacuum systems
Part Number
| VSA100A | |
|---|---|
| Part Number | Description |
| 399-001 | VSA100A Vacuum Switch DN16KF, 3m Cable |
Dimensions
Specifications
| Type | VSA100A | |
|---|---|---|
| Switching pressure | mbar | 6 ±2 (below atmosphere) |
| Back switching | mbar | 3 ±2 (below atmosphere) |
| Operating pressure (absolute) | bar | <2 |
| Helium permeation | mbar•L/s | <10-6 |
| Leak rate | mbar•L/s | <5 x 10-8 |
| Temperature | ||
| Operation | °C | 0 … +85 |
| Storage | °C | -20 … +85 |
| Switching contacts (Change over contact, gold plated) | ||
| Voltage max. | 24 VDC | |